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Wydawnictwo: Academic Journals Poznan University of Technology

Numer: 73/2013 Str: 29

Autorzy: Vaclav Starman, Jan Kacerovsky, Jindrich Jansa, Pavel Karban, Ivo Dolezel

Tytuł: Comparison of efficiency of electrostatic micro-actuators for precise positioning

Streszczenie: Comparison of several types of electrostatic micro-actuators is carried out, particularly with respect to their resultant force effects. The continuous mathematical model of such actuators is mostly described by the Laplace equation. In this paper, its numerical solution is performed by a fully adaptive higher-order finite element method, using a code developed by the authors. The methodology is illustrated by typical examples whose results are discussed.

Słowa kluczowe: electrostatic micro-actuators, mathematical model, finite element method, Laplace transformation