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Wydawnictwo: Computer Applications in Electrical Engineering

Numer: 12/2014 Str: 407

Autorzy: Sebastian Kula, Aurel-Sorin Lup

Tytuł: Electrical schematics for 1D analysis of a bridge type MEMS capacitive switch

Streszczenie: In this paper, a robust method to analyse a simple model of a RF (Radio Frequency) MEMS (Micro Electro-Mechanical Systems) capacitive switch is depicted. The method is based on multi-physics phenomenons and interdependencies between different physics domains. A component, which enables to link variety of the physics domains is an electrical equivalent circuit. Such equivalent circuit has been created in LTSpice software, which is a freeware circuits simulator. This electrical equivalent schematic enables to run static, frequency domain, transient analysis. The presented method enables simultaneous simulations in an electrical, mechanical and electro-mechanical domain. Obtained results were verified by the comparison with the results of a commercial software, a scientific software and data from literature. The method, presented in the paper gives robust, accurate results in the one-dimensional analysis domain of simple mechanical resonators, which are simplified mechanical models of the

Słowa kluczowe: RF MEMS capacitive switch, electrical equivalent schematic, multi-physics simulations